Thermally-Compensated Optical Fiber Silicon Sensor Platform

This paper describes the characterization and testing of a temperature-compensated optical fiber platform for silicon sensors. Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in silicon sensors are significant for operational temperatures from 275-315 K but can be compensated using a collocated nano-fabricated temperature sensor. Our silicon temperature sensor is a
$150~\mu \text{m}$
wide and
$5~\mu \text{m}$
thick disk that is fabricated on the wafer-scale with a 3 mK/
$\sqrt {Hz}$
resolution and a 1.7 s thermal time constant in air. Our temperature-compensated platform has sufficient sensitivity and bandwidth to reduce thermal signals in silicon pressure sensors and microphones by more than an order of magnitude.