On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements

In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5
$\mu$
Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1
$\mu {\mathrm {Gal}}/\sqrt{\rm Hz}$
@1 Hz, as well as an excellent stability, with an Allan deviation of 3
$\mu$
Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters.