The Influence of Ambient Temperature on the Sensitivity of MEMS Vector Hydrophone

During underwater acoustic detection, the positioning accuracy of the bionic cilia MEMS vector hydrophone is affected by its own sensitivity. MEMS vector hydrophone operate in different temperature environments, so studies on the environmental temperature and the sensitivity of the MEMS vector hydrophone are of great significance. In this paper, based on the sensitivity of the MEMS vector hydrophone at room temperature (22°C), its sensitivity variation is studied within the temperature range of 0–40°C. The relationship between the temperature and the piezoresistor in the MEMS vector hydrophone is theoretically analyzed, and it is concluded that the sensitivity change is within ±0.6dB. The sensitivity change of MEMS vector hydrophone is proved to be within ±0.3 dB via COMSOL 5.4 simulation software, and the MEMS vector hydrophone is verified experimentally by the hydrophone temperature characteristic testing system. The results show that the variation of the sensitivity is within ±0.5 dB, which is basically consistent with the theoretical analysis results and simulation results. It can be said that under normal non-extreme ambient temperature, the operating temperature has little effect on the sensitivity of the MEMS vector hydrophone.