Vector High-Resolution Marine Turbulence Sensor Based on a MEMS Bionic Cilium-Shaped Structure

Studies show that the detection of vector turbulence characteristics is of significant importance for further cognition of the marine turbulence mechanism. However, a succedent research process may be impeded by the detection dimensionality of existing marine turbulence sensors. In the present study, a vector high-resolution turbulence sensor (VHTS) is designed from a cilium-shaped structure. The designed VHTS is based on the bionic principle and the MEMS manufacturing technology. A systematic investigation is conducted to improve the VHTS and meet the stringent requirements in marine applications. The measuring sensitivity and natural frequency of the VHTS are balanced by performing theoretical analyses and numerical simulations. Moreover, the vector detection mechanism of the sensitive microstructure is analyzed. Then the designed VHTS is fabricated and encapsulated elaborately by MEMS processes and three-dimensional heterogeneous integration. The calibration experiments show that the sensitivity of the designed VHTS is up to
$2.68\times 10^{-2}$
(
$\text{V}\cdot \text{m}\cdot \text{s}^{2}$
)/kg. The vector verification testing exhibits the excellent orientation behaviors of the designed VHTS, indicating the feasibility of the VHTS to realize the detection of vector turbulence characteristics. The present study may provide a new opportunity for accurate observation and mechanism cognition of turbulence.