High-Sensitive Gas-Mixture Detection Using Localized Surface Plasmon Resonance Behavior in an Optimized MDM Array

A gas-mixture sensor based on local surface plasmon resonance (LSPR) behavior in metal-dielectric-metal (MDM) periodic array is proposed. The comparisons of gas sensing performance between metal-dielectric (MD) and MDM structure are discussed for single-gas and gas-mixture separately. The influence of MDM structural parameters on the extinction spectrum and gas sensitivity are analyzed to obtain optimal parameters. By replacing the dielectric with suitable gas-sensitive films, the gas mixture of methane and hydrogen can be accurately measured without interfering with each other. The methane and hydrogen sensitivities can reach to -3.435nm /% and -0.72nm /%, respectively. The results also verify the feasibility of multi-channel gas detection and provide an effective method for gas component analysis.