Design and Experiment of MEMS Solid-State Wave Gyroscope Quadrature Error Correction System

A novel gyroscope quadrature error correction system based on quadrature force correction is introduced in this article. The source of quadrature error of MEMS solid-state wave gyroscope is analyzed. The main source of quadrature error is the inevitable machining error. The gyroscope system model is established, the quadrature error correction method is proposed, and the quadrature error correction system is simulated. Through the comparative test, the gyroscope with quadrature error correction system has a better performance. With the addition of quadrature error correction system, the scale factor of the gyroscope changes from 1.13 to 1.02 mV/°/s, the nonlinearity is increased from 1382.7 to 795.4 ppm, and the asymmetry is improved from 1532.4 to 945.1 ppm, the angle random walk (ARW) from 269.1 to 39.45°/h/
$\surd $
Hz, and the bias stability from 46.62 to 6.785°/h.