Design and Performance Analysis of a Microbridge and Microcantilever-Based MEMS Pressure Sensor for Glucose Monitoring

Diabetes is caused by frequent urination, extreme hunger, increased thirst, irritability, fatigue, and blurred vision. Here, the proposed pressure sensor is used to detect the glucose concentration levels in the human body. It is applicable in the field of biomedical applications. In this article, we have designed, optimized, and analyzed the simulation of a microbridge and microcantilever based on the nonlinearity and sensitivity aspects using the finite element methods (FEM) tool, which is further integrated into electro-osmosis pressure sensor that detects the change in glucose levels in a continuous glucose monitoring system. This article evaluates that the sensitivity of the microbridge and microcantilever is 1.5e−7 and 5.2e−6, stress is 0.29 and 1–64, change in resistance is 0.000015 and
$0.00011 \Omega \cdot \mu \text{m}$
, the output voltage is 5.11 and
$0.15 ~\mu \text{v}$
, and the gauge factor is 22 and 24.