A 300mm Si photonics platform for multi-applications

A 300mm Si photonics platform has been established for optical multi-applications. For device fabrication process, the advanced CMOS technology can lead to the performance improvement of optical devices. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform and discussed them theoretically. 50×50mm2 large Si interposers with photonics electronics convergence technology were demonstrated by using this platform.