A General Line–Line Method for Dielectric Material Characterization Using Conductors With the Same Cross-Sectional Geometry

This letter presents a general “line-line” (LL) method for measuring dielectric material's permittivity using transmission lines. Like the previous LL methods, the proposed method needs a fully characterized transmission line as a reference. Different from previous methods, the reference line can be loaded with an arbitrary material and can be of an arbitrary length. The proposed method is validated with on-wafer dielectric fluid measurement up to 50 GHz, and measurement results of pure water agree well with literature values.