In Situ Test of Thickness and Sheet Resistance of Conductive Nanomaterial Using Microwave Cavity

Both thickness and sheet resistance of conductive nanomaterial deposited on glass substrate have been simultaneously measured using the TE
₀₁₁
mode cavity method. Measurements have been performed in two cavities with resonant frequency of ~10.8 and ~17.7 GHz, respectively. Measurement errors of thickness and sheet resistance can reach below 10%. Compared to existing methods, the presented method does not require prior knowledge on either film thickness or conductivity; what is more, by using the film as one of the end plates of the cavity, this method is noncontact and has little requirements on sample shape. These advantages suggest that the presented method has potential to be used in situ of monitoring the metal film characteristics such as that in microelectronic fabrication industry.