A novel resonant accelerometer based on mode localization of weakly coupled resonators

This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer. When acceleration acts on the two proof masses, there will be a differential electrostatic stiffness perturbation introduced on the WCRs, which leads to mode localization and mode shape change. Therefore, the acceleration can be sensed by measuring the amplitude ratio shift. The measured relative shift in amplitude ratio (~312162 ppm/g) is 302 times higher than the shift in resonance frequency (~1035 ppm/g).