A Schottky-barrier silicon FinFET with 6.0 mV/dec Subthreshold Slope over 5 decades of current

In this paper, we demonstrate a steep Subthreshold Slope (SS) silicon FinFET with Schottky-barrier source/drain. The device shows a minimal SS of 3.4 mV/dec and an average SS of 6.0 mV/dec over 5 decades of current swing. Ultra-low leakage floor of 0.06 pA/μm is also achieved with high I
_on
/I
_off
ratio of 10
⁷
.