2.45-μm 1280 × 1024 InGaAs Focal Plane Array With 15-μm Pitch for Extended SWIR Imaging

A
$15~\mu \text{m}$
pitch extended wavelength In
_0.83
Ga
_0.17
As/ InP mega-pixel focal plane array (FPA) with a format of 1280
$\times 1024$
and a spectral response range of 1150–2450 nm has been demonstrated for the first time. High fill factor up to >86%, low dark current densities down to < 133 nA/cm
²
, high quantum efficiencies up to >69%, were achieved by implementing novel high density micro-mesa array processing technologies. A proprietary wafer bowing control technique was developed, attaining a high pixel operability of 99.37%. Laboratory imaging was also demonstrated, showing potentiality for high resolution imaging applications in a wider SWIR spectrum range.