Wavelength Tunable Cavity Mirror for Silicon Micro-Ring-Based Hybrid Integrated Lasers

Two types of wavelength tunable cavity mirrors have been presented and silicon-on-insulator (SOI) platform. Both cavity mirrors show high reflectivity and large Q magnitude. They are used for realizing the silicon hybrid integrated lasers. The Q magnitude of the mirrors is about 6 × 10
⁴
, and the reflectivity is more than 95%.We use a suspended edge coupler to connect the III-V semiconductor optical amplifier chip and the cavity mirrors. The measured highest laser output power is 6.1 mW in uncooled condition. A wide bandwidth tenability (the whole FSR) can be achieved, the tuning efficiency is about 6.7 mW/nm, and over 35-dB side mode suppression ratio is obtained.