Light Extraction Enhancement of GaN LEDs by Hybrid ZnO Micro-Cylinders and Nanorods Array

A hybrid patterned ZnO micro-cylinders and nanorods array (MCNR) was fabricated to improve the light extraction efficiency for high brightness GaN-based light-emitting diodes (LEDs). The light extraction efficiency of the LEDs with the ZnO MCNR is increased by 86.4% compared with conventional planar LEDs. LEDs with ZnO MCNR have greater light extraction efficiency than those only with ZnO micro-cylinders or ZnO nanorods array. The optical-electrical characteristics and far-field radiation patterns are measured and analyzed. The local optical field distribution patterns of the LEDs with ZnO micro-cylinders, ZnO nanorods, and ZnO MCNR are investigated using confocal scanning electroluminescence microscopy. The higher light extraction enhancement effect of ZnO MCNR is attributed to that it combines the light outputting effect from side walls of ZnO micro-cylinders and the light scattering effect of ZnO nanorods array.