20–80nm Channel length InGaAs gate-all-around nanowire MOSFETs with EOT=1.2nm and lowest SS=63mV/dec

In this paper, 20nm-80nm channel length (L
_ch
) InGaAs gate-all-around (GAA) nanowire MOSFETs with record high on-state and off-state performance have been demonstrated by equivalent oxide thickness (EOT) and nanowire width (W
_NW
) scaling down to 1.2nm and 20nm, respectively. SS and DIBL as low as 63mV/dec and 7mV/V have been demonstrated, indicating excellent interface quality and scalability. Highest I
_ON
= 0.63mA/μm and g
_m
= 1.74mS/μm have also been achieved at V
_DD
=0.5V, showing great promise of InGaAs GAA technology for 10nm and beyond high-speed low-power logic applications.