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application/pdfIEEEIEEE Access;2020;8; ;10.1109/ACCESS.2019.2957298Piezoelectric actuatorsultrasonic motorsmicromotorsmicroroboticsvisual servoHigh-Speed Visual Feedback Control of Miniature Rotating Mirror System Using a Micro Ultrasonic MotorTomoaki MashimoShunsuke IzuharaShiro AraiZhong ZhangHiromasa Oku
IEEE Access38546 2020810.1109/ACCESS.2019.295729838553
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