High Performance Micro Resonators-Based Sensors Using Multimode Excitation

We present a multi-mode excitation technique to significantly amplify the amplitude signal of micro-resonators-based sensors operating at their higher-order modes. We show that the multi-mode excitation can significantly reduce the noise effects, elevate the dynamic response level, and amplify the total amplitude response. We demonstrate the efficiency of the multi-mode excitation to enhance the performance of a gas sensor using electrothermally heated doubly-clamped buckled beams. The results indicate clear amplification for the response at the 2nd mode while detecting Helium compared to a single-source excitation. A 24-times amplitude magnification is achieved. The demonstrated approach provides a promising path to efficiently exploit the higher-order modes of resonant gas sensors leading to improved accuracy and resolution.