Thick Film Ultrasonic Micromotor Based on Chemical Mechanical Thinning and Polishing Process

In this letter, a millimeter scale thick film rotating traveling wave ultrasonic motor based on chemical mechanical thinning and polishing process was proposed. The 30
$\mu \text{m}$
thick piezoelectric functional layer is fabricated to realize good compactness and high piezoelectric properties. The thickness and diameter of the stator are about 240
$\mu \text{m}$
and 4 mm, respectively. The vibration mode of the motor is B02 mode under the resonant frequency of 26.2 kHz. The motor can achieve stable bidirectional rotation under the excitation of four sinusoidal voltages. Moreover, when the excitation voltage is 50
$\text{V}_{\text {pp}}$
, the maximum speed can reach 766 rpm under the preload force of 686
$\mu \text{N}$
.