A Millimeter-Wave Broadband Reflectionless ESD Protection Device

In this letter, a broadband millimeter-wave (mm-wave) electrostatic discharge (ESD) protection structure is proposed and verified in a 40-nm CMOS process. The main ESD protection device is a diode-triggered silicon-controlled rectifier (DTSCR) with a tunable trigger voltage. Two weakly-coupled inductors are embedded to increase the operating bandwidth. Both theoretical analysis and simulation results show that a low coupling factor is necessary to obtain the wideband characteristic. The proposed design exhibits good ESD protection performance (HBM robustness >1.875 kV), fast turn-on speed, wideband reflectionless characteristic (
${S}_{{11}} < -15$
dB within 33.6-50GHz), tunable trigger voltage and low leakage current. Therefore, this new device is suitable for ESD protection of input/output (I/O) pads in mm-wave-communication applications.