Highly Efficient Resonant Tunneling Diode Terahertz Oscillator With a Split Ring Resonator

Compact resonant tunneling diode (RTD) oscillators have attracted considerable attention for terahertz generation at room temperature. Here, we propose and fabricate a novel and highly efficient RTD with a square split ring resonator (SRR). An AlAs/InGaAs double-barrier RTD is integrated into the center split gap of the SRR with a perimeter of 52 μm. Coplanar stripline antennas are integrated with the SRR to increase the radiation efficiency. The highest measured oscillation frequency is 1.22 THz with an output power of ~ 7 μW. The measured highest output power is ~ 30 μW at 0.9 THz. The experimental results are in good agreement with the simulations. This work will promote the further studies of THz metamaterials.