360 GHz fMAX Graded-Channel AlGaN/GaN HEMTs for mmW Low-Noise Applications

We report scaled, graded-channel AlGaN/GaN HEMTs with an extrinsic f
_T
and f
_MAX
of 170 GHz and 363 GHz, which is the highest in emerging graded-channel GaN HEMTs. At 50-nm gate length, the f
_T
·Lg of 8.5 GHz·μm is comparable to that of conventional scaled AlGaN/GaN HEMTs fabricated together. At low DC power, the scaled graded-channel AlGaN/GaN HEMTs show a higher f
_MAX
than the scaled AlGaN/GaN HEMT with the same gate length. The devices also exhibit a 2 dB improvement in gain at low DC bias, and the measured minimum noise figure was as low as 0.5 dB at 30 GHz. This is comparable to state-of-the-art device noise figure from a 20-nm gate length AlGaN/GaN HEMT. The combination of improved f
_T
, f
_MAX
, and minimum noise figure at low DC power for the graded-channelAlGaN/GaN HEMTs shows great promise for ultra-low-power, low-noise amplifiers.