Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure

In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a “three-beam” structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of ± 500 g, corresponding to a foot print of the core part with 960 μm×600 μm. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.