Charge Controller With Decoupled and Self-Compensating Configurations for Linear Operation of Piezoelectric Actuators in a Wide Bandwidth

Charge control is a well-known sensorless approach to operate piezoelectric actuators, which has been proposed for more than 30 years. However, it is rarely used in industry because the implemented controllers suffer from the issues of limited low-frequency performance, long settling time, floating-load, and loss of stroke, etc. In this paper, a novel controller circuit dedicated to overcome these issues is presented. In the proposed scheme, a grounded-load charge controller with decoupled configuration is developed, which separates high-frequency and low-frequency paths, thus achieving arbitrarily low transition frequency without increasing the settling time. Based on this, a self-compensating configuration is further proposed and integrated into the controller circuit, which makes full use of controller output to improve its own control performance at low frequencies. Experimental results show that the presented charge controller can effectively reduce more than 88% of the hysteretic nonlinearity even when operating close to the transition frequency. To demonstrate its practical value, we then integrate it into a custom-designed high-speed atomic force microscope system. By comparing images obtained from using voltage drive and charge controller, it is clear that the piezoelectric hysteresis has been significantly reduced in a wide bandwidth.