Signal Processing in Cyber-Physical MEMS Sensors: Inertial Measurement and Navigation Systems

Motivated by industry needs, this paper focuses on statistical models, descriptive probabilistic data analysis, and data-prescriptive signal processing in smart inertial sensors. These multimode sensors combine physical and cyber components such as solid-state and micromachined motion sensing elements, processing and interfacing integrated circuits, middleware, and software. We develop consistent algorithms and tools based upon cross-cutting engineering science along with substantiation and validation. Fundamental, applied, and experimental results are reported. Our multidisciplinary findings advance fundamental knowledge and enhance transformative technologies. We empower synergetic system-level integration of diverse device physics with descriptive, predictive, and prescriptive analyses. This paper contributes to the design and deployment of the next generation of smart sensors which utilize front-end microelectronic, microelectromechanical system, and processing technologies.