Research on a Single-Vibrator Multimodal Inertial Impact Piezoelectric Motor With Self-Clamping Backsliding Suppression

Traditional inertial impact piezoelectric motors can only operate under quasi-static conditions, resulting in low output force, torque, and speed, and there is a backsliding distance at each cycle that affects their working stability. Recently, many research works have changed their quasi-static working state to a resonance state. In this study, a novel inertial impact piezoelectric motor is proposed. The multimodal and multifrequency band driving method can enable the driver to achieve bidirectional driving and wide resolution adjustment only using a single vibrator, and the unique self-clamping mechanism can effectively suppress the backsliding phenomenon. The dynamics model and FEM model are used for dynamic analysis and modal analysis of the proposed actuator. Manufacturing a prototype and building a test bench to test the performance of the motor. The experimental results show that in the resonant state, the maximum forward output speed is 4.401 mm/s and the displacement resolution is 66
μ
m in first-order vibration mode. The maximum reverse output speed is 5.369 mm/s and the displacement resolution is 12
μ
m in second-order vibration mode. Meanwhile, the maximum load capacity of the motor is 180 g. Under quasi-static conditions, the minimum displacement resolution of the motor can reach 4
μ
m. Under 1 N preload, the backslidings of forward and reverse motor operation are 7.83% and 2.89%, respectively. Under 2 N preload, they are 3.98% and 1.53%, respectively. When the preload exceeds 3 N, the motor does not experience any rebound phenomenon in any state.