Microseismic Observation Enabled by High-Sensitivity Micromechanical Interferometers

High-sensitivity accelerometry has historically been employed to explore Earth sciences and advance resource-related industries, such as petroleum exploitation. The devices capable of such measurements, however, traditionally involve precise mechanical structures and consequent large dimensions. In this article, combined by micromechanical systems and grating-assisted interferometry, a closed-loop optical accelerometer with nano-g (ng) sensitivity is developed for microseismic observations. In order to lower the intrinsic thermal noise, a modified 8.84-Hz micromechanical spring–mass oscillator is designed and fabricated. Additionally, an active control system is equipped to stabilize the device temperature, and thus, enhance the low-frequency stability. Field tests demonstrate that the prototype has achieved a scale factor of 1195 V/g, along with a dynamic range of 1.12 mg and a bandwidth of about 7 Hz. Further, under the controlled 45
$\pm$
0.01
$^{\circ }$
C temperature condition, complete terrestrial microsesimic peaks from 0.1 to 3 Hz are tracked. After calibration by a reference seismometer, the device self-noise is determined as 2 ng/
$\sqrt{\text{Hz}}$
from 0.2 to 4 Hz with a bias stability of 7.9 ng. The transducer and control circuits are both packaged within a 13.6 cm × 13.6 cm × 12.8 cm insulated enclosure, making it advantageous for outdoor observations.