Empirical Transfer Function Estimation With Differential Filtering and Its Application to Fine Positioning Control of Galvano Scanner

Fast and precise point-to-point (PTP) positioning control is a critical technology for improving the throughput and product quality of industrial machines. This study aims to investigate the frequency response function (FRF) estimation method with differential filtering (ETFE-Diff: empirical transfer function estimation with differential filtering) that uses the input and output signals of PTP motion during processing operation and to apply ETFE-Diff to a feedforward (FF) compensation adjustment. In this study, the principle of ETFE-Diff for FRF estimation was clarified, compared to the existing FRF estimation methods, i.e., empirical transfer function estimation and local rational modeling. Moreover, the effectiveness of ETFE-Diff for FF compensation adjustment in improving positioning accuracy of a galvano scanner as an industrial servo system was experimentally demonstrated.