Static Pull-In Behavior of Hybrid Levitation Microactuators: Simulation, Modeling, and Experimental Study

In this article, a systematic and comprehensive approach based on finite element analysis and analytical modeling for studying static pull-in phenomena in hybrid levitation microactuators is presented. A finite element model of electromagnetic levitation microactuators based on the Lagrangian formalism is formulated and developed as a result of recent progress in the analytical calculation of mutual inductance between filament loops. In particular, the developed finite element model allows us to calculate accurately and efficiently a distribution of induced eddy current within a levitated micro-object. At the same time, this fact provides a reason for formulating the analytical model in which the distribution of the induced eddy current can be approximated by one circuit represented by a circular filament. In turn, both developed models predict the static pull-in parameters of hybrid levitation microactuators without needs for solving nonlinear differential equations. The results of modeling obtained by means of the developed quasi-finite element and analytical model are verified by the comparison with experimental results.