A Model Independent Control Scheme for Electromagnetic Scanning Micromirrors

Due to the existence of hysteresis and unmeasured electromagnetic torque, it is not easy to establish an accurate model of an electromagnetic scanning micromirror (ESMM) system. Therefore, the use of model-based angle control strategies limits the large-scale application of ESMM chips in industrial manufacturing. In this article, a model independent control (MIC) method is proposed to control the deflection angle of ESMM, which can avoid the modeling process and facilitate the large-scale industrial application of ESMM chips. In the proposed approach, the controller design is not based on mathematical model of the micromirror but just using the measured input and output of the ESMM. To predict the behavior of ESMM with hysteresis, a model-free predictor based on the measured system I/O data is proposed. After that, an online model-free nonsmooth optimization algorithm is developed to search for the optimal control solution. Then, the stability of the MIC system is analyzed. At the end, the performance of the proposed method is verified through simulation and experimental results.