I. Introduction
The deep-ultraviolet (DUV) light-emitting diodes (LEDs) are of great interest for various applications, such as the biochemistry, medicine, water purification, and sterilization. Owing to the direct and wide bandgap energy, III-nitride semiconductors such as GaN, AlN, AlGaN, and InAlGaN are promising materials for the realization of high-efficiency DUV light sources [1]. To date, there are a few AlGaN-based DUV LED structures reported in the literature [2]–[6]. Even though efforts have been made to improve the quality of epitaxial growth, several challenges including high threading dislocation density, low light extraction efficiency, and low hole concentration still limit the external efficiency and retard the progress of mass production of DUV LEDs [4]–[6]. Besides the problem of crystal growth, the polarization effect may also influence the DUV LED performance as well.