Active Deformation Control for a Magnetically Levitated Planar Motor Mover

This article describes a method for the active control of the deformations on a magnetically levitated moving-magnet planar motor. The planar motor under consideration is comprised of a stator on a double coil array configuration and a mover with permanent magnets, and it is designed to perform positioning tasks with nanometer level of accuracy. Due to the spatially asymmetric, nonuniform force distribution on the magnet plate, mechanical deformations are induced to the mover, which can severely hinder the desired positioning accuracy. The proposed method overcomes this challenge by properly shaping the force distribution on the moving magnet plate, which is enabled by the presence of multiple coils interacting with the mover, corresponding to an “overactuation” scheme. As a consequence, the independent control of elementary deformation shapes (modes) is achieved. The proposed overactuation scheme is experimentally validated on a planar motor prototype, proving the efficiency of the proposed method during both standstill and motion.