Review on Solid-State-Based Marx Generators

Marx generators are widely used to produce transient high-voltage pulses. The evolution of semiconductor devices and power electronics concepts promotes the development of solid-state Marx generators (SSMGs) and enables them with flexible pulse modulation ability. First, this article sorts out the evolution of SSMGs topologies chronologically. We can see that how the energy efficiency of SSMGs is considerably improved by replacing resistors with diodes and switches and how square-wave pulses are generated by SSMGs based on half-bridge structures. Unipolar and bipolar pulses can be easily produced with different SSMGs. Second, we discuss the influence of rated voltage and rated power of present semiconductor switches on the performances of SSMGs since switches are the key components in pulse generators. To reduce the size and weight of SSMGs, metal–oxide–semiconductor field-effect transistors (MOSFETs) and insulated gate bipolar transistors (IGBTs) with small packages are preferable. Third, synchronous isolated driving of switches as the crucial technique in SSMGs is introduced. Different methods of providing synchronous signals and isolated power to various stages in SSMGs are illustrated. Fourth, the performance including load capacity, droop compensation, waveform modulation, and self-triggering of SSMGs is discussed. In the end, the developing trend of SSMGs is given.