A Microwave-Induced Atmospheric-Pressure Low-Temperature Linear Plasma Source Based on Parallel Plate Transmission Lines

This article presents a new type of microwave-induced atmospheric-pressure low-temperature dielectric barrier discharge source, based on the principle of parallel plate transmission lines (PPTLs). This source is a simple structure with small size, large plasma discharge area, and low discharge temperature. Experiments show that linear plasma discharge with width of 15 mm can be obtained with input power of only 25 W at 2.45 GHz. The temperature of sample placed 1 mm vertically away from the nozzle and treated for 3 min is about 45 °C even with 60-W microwave input power, which proved its thermal safety even for the biomedical applications. Emission spectroscopy diagnosis indicates that the electron density of plasma can be controlled easily by adjusting the discharge gap and the dielectric thickness. It makes this source available for various applications. This work provides a new approach to obtain uniform linear plasma.