Negative-Bias-Stress and Total-Ionizing-Dose Effects in Deeply Scaled Ge-GAA Nanowire pFETs

Negative-bias-stress and total-ionizing-dose (TID) effects in deeply scaled Ge-gate-all-around (GAA) nanowire (NW) devices are characterized for different biasing conditions. Negative-bias-stress-induced degradation in Ge GAA device originates primarily from the interface- and border-trap generation. Devices stressed at high gate voltage show rapid initial degradation and quick saturation dominated by interface-trap generation. Radiation-induced OFF-state leakage current in Ge GAA NWs increases with dose due to enhanced band-to-band tunneling (BTBT) caused by charge trapping in the shallow trench isolation (STI).