Mapping the Spatial Dependence of Charge-Collection Efficiency in Semiconductor Devices Using Pulsed-Laser Testing

By scanning the charge-deposition profile produced by a pulsed laser throughout a device, the spatially dependent charge-collection efficiency (CCE) can be determined. This is demonstrated by extracting the depth-dependent CCE in two photodiodes. The resulting collection efficiency curves are found to be consistent with their device structures and the expected charge-collection mechanisms. By applying the efficiency curves to the charge-deposition curves for both heavy ions and pulsed X-rays, the calculated collected charge values show very good agreement with experimental results. This suggests that the profiles extracted using the laser can help predict charge-collection data from other excitation sources and could improve modeling efforts by determining sensitive volumes.