I. Introduction
Nowadays, the constant evolution of nanometric integrated technologies with optimized back-end-of-line (BEOL) metal stacks allows the development of high-performance monolithic millimeter-wave (mm-wave) circuits. This evolution is guided by the needs of a wide variety of applications such as high-data-rate communications, healthcare imaging systems, and automotive radar. Monolithic mm-wave integration in conventional silicon technologies has the clear advantage of reducing the cost and enabling the co-integration with complex VLSI systems, including analog, mixed-signal, and digital functions. However, at the same time, integrating mm-wave circuits in advanced nanometric technologies creates new challenges. Nanometric technologies are prone to process variations that may dramatically degrade the performance of sensitive radio frequency (RF) and mm-wave circuits [1], [2]. In addition, mm-wave circuits often include full-custom passive elements, which may complicate evaluating the impact of process variations at the design stage. As a consequence, fabrication yield may be significantly limited, especially for safety-critical applications with stringent performance requirements.