Design and Analysis of a 2-D Piezoelectric Platform Based on Three-Stage Amplification and L-Shaped Guiding

In piezoelectric micropositioning platforms, the displacement amplification mechanism can solve the small output displacement of the platform; the displacement coupling will also increase when the displacement is amplified. To solve the problem of multistage displacement amplification and displacement coupling after multistage displacement amplification, this study proposes a 2-D piezoelectric platform based on three-stage amplification and L-shaped guiding. First, the structure of the 2-D piezoelectric platform is designed and its working principle is described. Next, the 2-D piezoelectric platform is analyzed theoretically, and the static and dynamic characteristics of the structure are analyzed by the finiteelement method. Finally, a prototype of the 2-D piezoelectric platform is fabricated, and the theoretical and simulation results are analyzed experimentally. The experimental results reveal that the platform has a motion range of
$31.8\times41\,\,\mu \text{m}$
. The multistage displacement amplification ratio is 21.8, and the displacement coupling error is less than 4.2%. The positioning error of the closed-loop control platform is less than 0.5%, and the trajectory tracking error is less than 1.6%. Compared with the traditional piezoelectric micropositioning platform, the three-stage amplification and L-shaped guiding mechanism can effectively improve the displacement magnification and decoupling performance of the piezoelectric micropositioning platform as well as the positioning ability and trajectory tracking ability of the platform under closed-loop control, which is expected to be utilized in fields such as multistage amplification micropositioning platforms and dynamic optical systems.