Reference Ultralow DC Current Source Between 1 fA and 100 pA at TÜBİTAK UME

In this paper, we present a programmable ultralow dc current source developed at TÜBİTAK UME. The output current range is from 1 fA to 100 pA with 100 aA resolution and is directly traceable to dc voltage, capacitance, and time units. The principle of the device is based on applying a linear ramp voltage on standard capacitors with values between 1 and 1000 pF. These standard capacitors are commercial standard capacitors which are kept in a temperature controlled insulated box. Linear ramp voltage is generated using a commercial data acquisition card. Current source device is fully automated with computer control and can be used to generate any currents with 100 aA resolution in its full range. The uncertainty is 2.5 mA/A at 1 fA current.