High-Compactness Bessel Beam Emitters Based on Vertical-Cavity Surface-Emitting Lasers

The existing Bessel beam generators generally require bulk optics counterparts and additional spatial laser sources, which adds complexity and bulkiness to the system. In this work, we propose Bessel beam devices with high compactness based on vertical-cavity surface-emitting lasers (VCSELs) and microdielectric axicons made by Si
₃
N
₄
. The transparent microaxicons are fabricated by one-step direct writing of focused ion beam (FIB) on the surface of meticulously designed top-emitting VCSELs. Zero- and first-order Bessel beams are obtained by engineering the lasing modes of the VCSELs through simply adjusting the oxide aperture diameter. Even if the VCSEL device works at multimode, Bessel beams can still be realized. This method provides great compatibility with different VCSEL configurations and emitting wavelengths. Such high-compactness devices may enable advanced research and applications relevant to Bessel beams.