Fabrication of ZnO Nanowire Field-Emitter Arrays With Focusing Capability

ZnO nanowire field-emitter arrays (FEAs) show great application potentials in large-area vacuum microelectronics devices. However, the electron divergence is an issue which should be addressed. In this paper, ZnO nanowire FEAs with co-planar focus electrode were designed. A four-mask fabrication process and lift-off process were adopted to achieve the integration of focus electrode. The device demonstrated line-addressing and focusing capability with a spacing of 5 mm between anode and cathode, and the linewidth of field-emission images was reduced from 2.25 to 1.35 mm when the focus voltage changed from 50 to -50 V. Besides, line-shaped emission patterns were observed during focusing process, which was attributed to the emission pattern from the ZnO nanowire and the asymmetrical focusing electrical field.