Structural and Sensing Properties of Sol–Gel Synthesized Ce2(Zr1–xTix)Oy Sensing Films for pH Sensors

In this brief, the structural properties and sensing characteristics of spin-coated Ce
₂
(Zr
_1-x
Ti
_x
)O
_y
(CZT) sensing film were investigated for electrolyte-insulator-semiconductor (EIS) pH sensors. A higher pH sensitivity of 64.42 mV/pH, a lower hysteresis voltage of 1.1 mV, and a smaller drift rate of 0.36 mV/h were achieved in the CZT-embedded EIS sensors at Zr/Ti = 53/47 stoichiometry. The higher sensing behavior in CZT is attributed to the good crystallization and higher surface roughness of the film.