Concurrent Efficient Evaluation of Small-Change Parameters and Green’s Functions for TCAD Device Noise and Variability Analysis

We present here an efficient numerical approach for the concurrent evaluation of the small-change deterministic device parameters and of the relevant Green's functions exploited in the simulation of device small-signal (SS), small-signal large-signal (SSLS conversion matrix), stationary and cyclostationary noise, and variability properties of semiconductor devices through the solution of physics-based models based on a partial-differential equation description of charged carrier transport. The proposed technique guarantees a significant advantage in computation time with respect to the currently implemented solutions. The accuracy is the same as for the standard technique.