Active-Matrix Micro-LED Display Driven by Metal Oxide TFTs Using Digital PWM Method

This article presents a new micro-light-emitting diode (LED) pixel circuit driven by the digital pulsewidth modulation (PWM) method, in which the threshold voltage compensation of the driving thin-film transistor (TFT) is included. A scan driver integrated by metal oxide (MO) TFTs is also designed to provide the scan signals for pixel circuits array. A micro-LEDs array with
$76\,\, \times $
BBB
$\times \,\,78$
and a scan driver with 80 stages are simultaneously fabricated by MO TFTs backplane with back-channel etch (BCE) structure. A respective micro-LED display is consequently realized by a peripheral driving system based on a field-programmable gate array (FPGA), which is used as a core control unit to synchronize the scan signals with the data signals. It is shown that the micro-LED in the pixel circuit can operate at a constant current even at the 5-
$\mu \text{s}$
pulsewidth of the emission (EM) signal. The micro-LED display can achieve 256 linear grayscales with an approximately 60 Hz flash rate under the minimum pulsewidth of 40
$\mu \text{s}$
of EM signal.