Prediction of Full-stroke Positioning Accuracy of Precise Linear Stage for Ball Screw Pair

Positioning accuracy is a key indicator for measuring the motion accuracy of precise linear stage (PLS). This paper analyzes the error sources of high-precision PLS for ball screw pairs, reveals the transmission law of positioning accuracy, and proposes a method for predicting the full-stroke positioning error of PLS with ball screw pairs as the main research object, covering macro (10mm), small (1mm), and micro (0.1mm) stroke scales. The experimental results show that the model can predict the positioning error well.