A Novel Hybrid-FE-layer FeFET with Enhanced Linearity for On-chip Training of CIM Accelerator

In this work, a novel hybrid ferroelectric (FE) layer FeFET based analog weight cell was proposed to optimize the weight update linearity for on-chip training. Combining a Hf
0.5
Zr
0.5
O
2
and Hf
0.95
Al
0.05
O
2
layer, the hybrid FE stack features a more dispersed coercive field (E
c
) distribution, thus achieving a high linearity of $\alpha_p=-0.48$ and $\alpha_{\mathrm{d}}=-1.73$, with a simulated $\sim 92.4$% recognition accuracy of the MNIST dataset. The mechanism of the improvement was analyzed by comparison with control group.