Networked MEMS pressure sensor design to detect pore water pressure for landslide monitoring

The networking of MEMS sensors is addressed here, In order to detect pore water pressure during landslides. Micro piezoresistive pressure sensors that are appropriate for detecting landslides by monitoring pore pressure have been designed, modeled, and simulated. MATLAB is used for analytical simulation of the sensor, while INTELLISUITE, a FEA CAD program, is used for numerical simulation. Square diaphragms with varying side and thickness dimensions are optimized. The length, breadth, depth, and positions of the piezoresistor are all optimized. The pressure range that the sensor is intended to detect is (0 - 350) kPa. The large and expensive piezometer will be replaced with the developed sensor.