Single Crystal Lithium Niobate Cylindrical Resonator for High-Performance Miniature Piezoelectric Gyroscope

In this report, we developed a single crystal lithium niobate cylindrical resonator for piezoelectric vibrating gyroscope of small size and low operating frequency. The cylindrical resonator was fabricated by grinding a 3-mm-thick 155° Y-cut LN wafer. The gold electrodes were patterned using oblique lithography. An electrode on each side of the bottom plate and eight electrodes inside of the cylinder sidewall were designed for 0° and 45° modes, respectively. The impedance spectrum of the fabricated cylindrical resonator observed two wineglass modes around 35 kHz. Operation as a gyroscope was successfully conducted using a digital lock-in amplifier (LIA). The measured bias instability ranged from 133 deg/h to 418 deg/h showing dependence on mode mismatch.