The Influence of Heterogeneous RDL on the RF characteristic of Millimeter wave Phased Array Microsystem

The RF reliability of the redistribute layer (RDL) under different EM environment was investigated and the loss mechanism of the RDL was analyzed. The interconnect performance was characterized by the S parameters in the millimeter wave range. The test vehicles of the RDL with microstrip (MS) were studied. The material characterization methods for heterogeneous multilayer dielectrics was studied, and the material dielectric constants in different frequency bands was investigated. The influence of heterogeneous multilayer materials on the electromagnetic properties of the phased array was also studied and the design methods of highly reliable heterogeneous multilayer package was explored.