Research on PID parameter self-tuning and feedforward control of precision X-Y motion platform for wire bonding machine

Nowadays, the performance requirements of semiconductor equipment are becoming more and more stringent. Wire bonding machine is an important semiconductor chip packaging equipment, requiring high motion accuracy. In this paper, we propose an improved fruit fly optimization algorithm(IFOA) to study the parameter tuning of the PID controller of the X-Y motion platform of the wire bonding machine for the problems of inefficient and tedious manual tuning of PID parameters. This algorithm changes the way of the fruit fly optimization algorithm(FOA) search step to the adaptive step, which can effectively improve the search accuracy.Due to the nonlinear effects and external disturbances on the PMSM motion platform, a three-closed-loop PID control with a fourth-order S-curve motion planning is used in this paper to avoid excitation of excessive residual vibration while shortening the positioning time.Simulation experiments are performed by a mathematical simulation model of the permanent magnet synchronous motor of the motion platform established under MATLAB/Simulink. The tuning effects of the Ziegler-Nichols method(Z-N), genetic algorithm(GA), FOA and IFOA on position loop PID parameters is compared and analyzed. The experimental results are obtained by comparing the system motion performance results after the above four methods of rectification. The IFOA outperforms the other methods in terms of the optimization capability and tuning efficiency, and solves the problem that the other algorithms easily fall into local optimum. Based on the above results, in order to achieve higher precision motion control, while using a PID controller to ensure the stable performance of the system, a feedforward control is used to compensate for the lack of feedback control and improve the dynamic performance of the system.